Batch Create process and 500 internal server error

I am getting a 500 internal server error with a bunch of "Premature end of script headers:" errors after running a batch create process. It created about 84 of my 98 sites but now I am totally locked out and am not sure what to do. I deleted what was in the batch queue in the db, but that had no effect. I have also restarted my vps to no avail.