Using subdomains in Multi-domain plugin as options to create subsites in Multisite subdirectory

Hi,

Referring to this thread which have similar situation:
https://premium.wpmudev.org/forums/topic/multi-subdomains-re-multi-domains-plugin

I want to create a multisite, subdirectory, and want to use subdomains as options to create sub blogs.

For example, I added these subdomains in multi-domain settings:
subsite1.example.com
subsite2.example.com

Then, added A records,
*.example.com
*.subsite1.example.com
*.subsite2.example.com

Then when creating subblogs in multisite, they were under the above subdomains:
subsite1.example.com/dir/
subsite1.example.com/dir2/

I got Internal Server Error in dir and dir1, in both in front-end and wp-admin

What do you think is the problem? Does the plugin function in this way? Is there anything wrong with the configuration?

Thanks in advance.